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 Hologenix LLC
Hologenix

Hologenix LLC.

Hologenix's product is an equipment that inspects wafers using Magic Mirror technology, and Hologenix is ​​operating R&D for application support. As a product specialized for wafer manufacturers, it is optimized for defect inspection that may occur during the wafer manufacturing process, slicing, polishing, and lapping.

  • Fully Automated Slip Detection
  • Full or Partial Wafer Inspection
  • Edge Grip
  • Adjustable Inspection and Slip Detection Recipes
  • Sub-micron Detection Sensitivity
  • Optical Field of View: 15mm X 12mm
  • Approx: 15 – 80 WPH
  • Dual FOUPs; Optional FOSB, Open Cassette
  • Optical Non-Contact Notch Finding
  • Class M1 Mini-Environment
  • Windows 10 Software Environment
  • SECS-GEM
  • Full Factory Automation
  • Sorter Capabilities – Optional OCR
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