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NORDSON & CYBEROPTICS
CYBEROPTICS (Korea Agency)
WaferSensetmproducts have been providing measurement and solutions for semiconductor manufacturing equipment, starting from ALS (Auto Leveling System) in 2004, to AVS (Auto Vibration System), AGS (Auto Gapping System), ATS (Auto Teaching System), and recently developed APS (Airborne Particle System), AMS (Auto Multi System) and Reticle Sense®. In addition, as of 2017, about 3,300 systems sold to worldwide so far.
- Products that selected by the market through rigorous verification
- - World leading FABs of semiconductor and equipment OEM companies choose CyberOptics wireless measurement devices to improve quality of yield, increase operating hours of facilities and increase throughput.
- - Several OEM companies recommend using WaferSensetm and Reticle Sense® devices as BKM (Best Known Method) to their equipment standard and that also help to improve the high precision and accuracy required for shaping the microminiature chips.
- Maximum efficiency and effectiveness
- - It is possible to monitor locations that were difficult or impossible to access before since it is possible to move without constraint by the moving line through a wireless measuring instrument in the form of a wafer or reticle.
- - It provides reliable and repeatable results since it is accurate and precise while saving time and cost compared to existing methods.
WaferSense®
AVS
AGS
APS2
AMS
ARS
AVLS
| Item | Description | Size | Down |
|---|---|---|---|
| AVS Automatic Vibration Measurement System |
An automatic vibration measurement system that can check how the vibration generated while the wafer returned inside the facility affects the wafer. X, Y, Z Acceleration and vibration measurements for 3 axes of X, Y, and Z are possible and can be checked in real time through software. | 200mm(8"), 300mm(12") |
down |
| ALS Automatic Leveling System |
A leveling measurement system that can check the leveling at the position where the wafer placed. Real-time verification and correction through graphics and figures are possible. In addition to leveling on the horizontal plane, it is also possible to measure vertically as an option. |
150mm(6"), 200mm(8"), 300mm(12") |
down |
| AGS Automatic Gap Measurement System |
A sensor that can adjust the gap uniformly by measuring the gap between the showerhead and the lower electrode in a non-contact method in semiconductor processes such as thin films deposition, sputtering, and etching. | 200mm(8"), 300mm(12") |
down |
| ATS Automatic Teaching System |
A sensor capable of teaching robots with an accuracy of up to 100um by expressing real-time images and numerical values from the center of the position where the wafer to be placed using a high-precision camera located in the center of the sensor. | 200mm(8"), 300mm(12") |
down |
| APS Particle Measurement Sensor |
A sensor that can monitor the size and quantity of particles in real time in 1 second increments using a laser scattering method after inhaling particles belonging to the atmosphere through the fan above the sensor. | 150mm(6"), 200mm(8"), 300mm(12") |
down |
| AMS Automatic Multi-Sensor |
Thinner and lighter all-in-one multi-sensor capable of measuring vibration, leveling and humidity. It can be used at a higher temperature than existing products and can measure data of three functions at the same time, reducing measurement and calibration time. MultiView, MultiReview software are provided. |
150mm(6"), 200mm(8"), 300mm(12") |
down |
| ARS Automatic Resistance Measurement System |
Accurately measure low-value resistance by utilizing the Kelvin method, which uses 50 individual measuring pads around the wafer edge. | 150mm(6"), 200mm(8"), 300mm(12") |
down |
| AVLS Automatic Leveling & Vibration Measurement System |
A thin and light multi-sensor capable of measuring vibration and leveling. | 150mm(6"), 200mm(8"), 300mm(12") |
down |
ReticleSense®
ALSR
AMSR
APSR
APSRQ
| Item | Description | Size | Down |
|---|---|---|---|
| ALSR Reticle Type Automatic Leveling System |
A leveling measurement system that can wirelessly check the leveling of the position where the reticle is placed in a facility. | 6" x 6" | down |
| APSR Reticle Type Particle Measurement Sensor |
A sensor for measuring reticle-shaped particles A sensor that can monitor the size and quantity of particles in real time in 1 second increments using a laser scattering method after inhaling particles belonging to the atmosphere through the fan above the sensor. |
6" x 6" | down |
| APRSQ Reticle (Quartz) Type Particle Measurement Sensor |
A sensor made of quartz material for measuring reticle-shaped particles A sensor that can monitor the size and quantity of particles in real time in 1 second increments using a laser scattering method after inhaling particles belonging to the atmosphere through the fan above the sensor. |
6" x 6" | down |
| AMSR Reticle (Quartz) Type Automatic Multi-Sensor |
All-in-one multi-sensor made of quartz material for measuring reticle shape, capable of measuring vibration, leveling, and humidity It can be used at a higher temperature than existing products and can measure data of three functions at the same time, reducing measurement and calibration time. |
6" x 6" | down |
| IPS (In-line Particle Sensor) |
IPS uses a high-power blue laser to quickly monitor/identify/solve particulate matter problems, and can measure particles in gas and vacuum lines down to 0.14μm in equipment for EUV and other semiconductor processes. | 6" x 6" | down |
IPS (In-line Particle Sensor)
IPS (In-line Particle Sensor)
| Item | Description | IPS In-line Particle Sensor |
IPS uses a high-power blue laser to quickly monitor/identify/solve particulate matter problems and can measure particles in gas and vacuum lines down to 0.14μm in equipment for EUV and other semiconductor processes. |
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